Scattering Theory

High-speed, high-accuracy optical measurements of polycrystalline silicon for process control

Engineering / Technology / Scattering Theory / Physical sciences / Feedback Control / Spectroscopic Ellipsometry / Thin Solid Films / Reactive ion etching / Polycrystalline Silicon / Film Thickness / Spectroscopic Ellipsometry / Thin Solid Films / Reactive ion etching / Polycrystalline Silicon / Film Thickness